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Improving the Electrical Contact Performance for Amorphous Wire Magnetic Sensor by Employing MEMS Process
This paper presents a novel fabrication method for amorphous alloy wire giant magneto-impedance (GMI) magnetic sensor based on micro electro mechanical systems (MEMS) technology. In this process, negative SU-8 thick photoresist was proposed as the solder mask due to its excellent properties, such as...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187486/ https://ncbi.nlm.nih.gov/pubmed/30424232 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9060299 |
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