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Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement
Low-frequency vibration is a harmful factor that affects the accuracy of micro/nano-measuring machines. Low-frequency vibration cannot be completely eliminated by passive control methods, such as the use of air-floating platforms. Therefore, low-frequency vibrations must be measured before being act...
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| Veröffentlicht in: | Sensors (Basel) |
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| Hauptverfasser: | , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2018
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6165265/ https://ncbi.nlm.nih.gov/pubmed/30200509 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18092910 |
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