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AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications
Current CMOS-micro-electro-mechanical systems (MEMS) fabrication technologies permit cardiological implantable devices with sensing capabilities, such as the iStents, to be developed in such a way that MEMS sensors can be monolithically integrated together with a powering/transmitting CMOS circuitry...
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| Publicado no: | Micromachines (Basel) |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6082281/ https://ncbi.nlm.nih.gov/pubmed/30424275 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9070342 |
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