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Experiments on MEMS Integration in 0.25 μm CMOS Process
In this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology. The experimental prototyping process is illustrated with examples of three CMOS-MEMS chips and starts...
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| Yayımlandı: | Sensors (Basel) |
|---|---|
| Asıl Yazarlar: | , , , , |
| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
MDPI
2018
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| Konular: | |
| Online Erişim: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6069414/ https://ncbi.nlm.nih.gov/pubmed/29966375 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18072111 |
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