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Bimorph material/structure designs for high sensitivity flexible surface acoustic wave temperature sensors
A fundamental challenge for surface acoustic wave (SAW) temperature sensors is the detection of small temperature changes on non-planar, often curved, surfaces. In this work, we present a new design methodology for SAW devices based on flexible substrate and bimorph material/structures, which can ma...
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| Publicado no: | Sci Rep |
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| Main Authors: | , , , , , , , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5998018/ https://ncbi.nlm.nih.gov/pubmed/29899347 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-27324-1 |
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