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Liquid-Assisted Femtosecond Laser Precision-Machining of Silica

We report a systematical study on the liquid assisted femtosecond laser machining of quartz plate in water and under different etching solutions. The ablation features in liquid showed a better structuring quality and improved resolution with 1/3~1/2 smaller features as compared with those made in a...

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Détails bibliographiques
Publié dans:Nanomaterials (Basel)
Auteurs principaux: Cao, Xiao-Wen, Chen, Qi-Dai, Fan, Hua, Zhang, Lei, Juodkazis, Saulius, Sun, Hong-Bo
Format: Artigo
Langue:Inglês
Publié: MDPI 2018
Sujets:
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC5977301/
https://ncbi.nlm.nih.gov/pubmed/29710764
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano8050287
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