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High Quality 3D Photonics using Nano Imprint Lithography of Fast Sol-gel Materials
A method for the realization of low-loss integrated optical components is proposed and demonstrated. This approach is simple, fast, inexpensive, scalable for mass production, and compatible with both 2D and 3D geometries. The process is based on a novel dual-step soft nano imprint lithography proces...
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| Publicado no: | Sci Rep |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5959872/ https://ncbi.nlm.nih.gov/pubmed/29777156 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-26261-3 |
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