APA Citation

Pirouz, A., & Degertekin, F. L. (2018). Low Temperature CMUT Fabrication Process with Dielectric Lift-off Membrane Support for Improved Reliability. J Micromech Microeng.

Citação norma Chicago

Pirouz, Amirabbas, and F. Levent Degertekin. "Low Temperature CMUT Fabrication Process With Dielectric Lift-off Membrane Support for Improved Reliability." J Micromech Microeng 2018.

MLA Citation

Pirouz, Amirabbas, and F. Levent Degertekin. "Low Temperature CMUT Fabrication Process With Dielectric Lift-off Membrane Support for Improved Reliability." J Micromech Microeng 2018.

Advarsel: Disse citationer er muligvist ikke 100% nøjagtige.