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Terahertz-driven polymerization of resists in nanoantennas
Plasmon-mediated polymerization has been intensively studied for various applications including nanolithography, near-field mapping, and selective functionalization. However, these studies have been limited from the near-infrared to the ultraviolet regime. Here, we report a resist polymerization usi...
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| Publicado no: | Sci Rep |
|---|---|
| Principais autores: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5958088/ https://ncbi.nlm.nih.gov/pubmed/29773858 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-26214-w |
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