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Super-resolution for asymmetric resolution of FIB-SEM 3D imaging using AI with deep learning

Scanning electron microscopy equipped with a focused ion beam (FIB-SEM) is a promising three-dimensional (3D) imaging technique for nano- and meso-scale morphologies. In FIB-SEM, the specimen surface is stripped by an ion beam and imaged by an SEM installed orthogonally to the FIB. The lateral resol...

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Bibliografiske detaljer
Udgivet i:Sci Rep
Main Authors: Hagita, Katsumi, Higuchi, Takeshi, Jinnai, Hiroshi
Format: Artigo
Sprog:Inglês
Udgivet: Nature Publishing Group UK 2018
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5897388/
https://ncbi.nlm.nih.gov/pubmed/29651011
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-24330-1
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