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Quasi-periodic concave microlens array for liquid refractive index sensing fabricated by femtosecond laser assisted with chemical etching

In this study, a high-efficiency single-pulsed femtosecond laser assisted with chemical wet etching method has been proposed to obtain large-area concave microlens array (MLA). The quasi-periodic MLA consisting of about two million microlenses with tunable diameter and sag height by adjusting laser...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Zhang, F., Wang, C., Yin, K., Dong, X. R., Song, Y. X., Tian, Y. X., Duan, J. A.
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5799298/
https://ncbi.nlm.nih.gov/pubmed/29402995
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-20807-1
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