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Atomic Force Microscopy Sidewall Imaging with a Quartz Tuning Fork Force Sensor
Sidewall roughness measurement is becoming increasingly important in the micro-electromechanical systems and nanoelectronics devices. Atomic force microscopy (AFM) is an emerging technique for sidewall scanning and roughness measurement due to its high resolution, three-dimensional imaging capabilit...
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| Veröffentlicht in: | Sensors (Basel) |
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| Hauptverfasser: | , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2018
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5795913/ https://ncbi.nlm.nih.gov/pubmed/29301265 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18010100 |
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