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STM patterned nanowire measurements using photolithographically defined implants in Si(100)
Using photolithographically defined implant wires for electrical connections, we demonstrate measurement of a scanning tunneling microscope (STM) patterned nanoscale electronic device on Si(100). By eliminating onerous alignment and complex lithography techniques, this approach is accessible to rese...
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| Udgivet i: | Sci Rep |
|---|---|
| Main Authors: | , , , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Nature Publishing Group UK
2018
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5788944/ https://ncbi.nlm.nih.gov/pubmed/29379057 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-20042-8 |
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