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Tailoring Lattice Strain and Ferroelectric Polarization of Epitaxial BaTiO(3) Thin Films on Si(001)
Ferroelectric BaTiO(3) films with large polarization have been integrated with Si(001) by pulsed laser deposition. High quality c-oriented epitaxial films are obtained in a substrate temperature range of about 300 °C wide. The deposition temperature critically affects the growth kinetics and thermod...
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| Udgivet i: | Sci Rep |
|---|---|
| Main Authors: | , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Nature Publishing Group UK
2018
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5765027/ https://ncbi.nlm.nih.gov/pubmed/29323164 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-18842-5 |
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