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High-Speed Focus Inspection System Using a Position-Sensitive Detector
Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution fo...
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| Vydáno v: | Sensors (Basel) |
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| Hlavní autoři: | , , , , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
MDPI
2017
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5751675/ https://ncbi.nlm.nih.gov/pubmed/29292722 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17122842 |
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