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Approaching the intrinsic quality factor limit for micromechanical bulk acoustic resonators using phononic crystal tethers
We systematically demonstrate that one-dimensional phononic crystal (1-D PnC) tethers can significantly reduce tether loss in micromechanical resonators to a point where the total energy loss is dominated by intrinsic mechanisms, particularly phonon damping. Multiple silicon resonators are designed,...
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| Publicado no: | Appl Phys Lett |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5749427/ https://ncbi.nlm.nih.gov/pubmed/29307895 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.4990960 |
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