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Minimizing open-loop piezoactuator nonlinearity artifacts in atomic force microscope measurements
Atomic force microscopes (AFMs) are widely used to study molecular interactions with piconewton force sensitivity. In an AFM, interaction forces are measured by reflecting a laser beam off a cantilever onto a position sensitive detector and monitoring cantilever deflection. Precise measurements of i...
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| Publicado no: | J Vac Sci Technol B Nanotechnol Microelectron |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
American Vacuum Society
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5648552/ https://ncbi.nlm.nih.gov/pubmed/29075581 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1116/1.4994315 |
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