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Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources
Time-resolved two-dimensional (2D) profiles of electron density (n (e)) and electron temperature (T (e)) of extreme ultraviolet (EUV) lithography light source plasmas were obtained from the ion components of collective Thomson scattering (CTS) spectra. The highest EUV conversion efficiency (CE) of 4...
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Publicado no: | Sci Rep |
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Main Authors: | , , , , , , , , , , , , , , |
Formato: | Artigo |
Idioma: | Inglês |
Publicado em: |
Nature Publishing Group UK
2017
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Assuntos: | |
Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5624956/ https://ncbi.nlm.nih.gov/pubmed/28970565 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-11685-0 |
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