Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources

Time-resolved two-dimensional (2D) profiles of electron density (n (e)) and electron temperature (T (e)) of extreme ultraviolet (EUV) lithography light source plasmas were obtained from the ion components of collective Thomson scattering (CTS) spectra. The highest EUV conversion efficiency (CE) of 4...

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Publicado no:Sci Rep
Main Authors: Tomita, Kentaro, Sato, Yuta, Tsukiyama, Syouichi, Eguchi, Toshiaki, Uchino, Kiichiro, Kouge, Kouichiro, Tomuro, Hiroaki, Yanagida, Tatsuya, Wada, Yasunori, Kunishima, Masahito, Soumagne, Georg, Kodama, Takeshi, Mizoguchi, Hakaru, Sunahara, Atsushi, Nishihara, Katsunobu
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2017
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5624956/
https://ncbi.nlm.nih.gov/pubmed/28970565
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-11685-0
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