In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon

Silicon is an excellent material for microelectronics and integrated photonics1–3 with untapped potential for mid-IR optics4. Despite broad recognition of the importance of the third dimension5,6, current lithography methods do not allow fabrication of photonic devices and functional microelements d...

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Publicado en:Nat Photonics
Main Authors: Tokel, Onur, Turnali, Ahmet, Makey, Ghaith, Elahi, Parviz, Çolakoğlu, Tahir, Ergeçen, Emre, Yavuz, Özgün, Hübner, René, Borra, Mona Zolfaghari, Pavlov, Ihor, Bek, Alpan, Turan, Raşit, Kesim, Denizhan Koray, Tozburun, Serhat, Ilday, Serim, Ilday, F. Ömer
Formato: Artigo
Idioma:Inglês
Publicado: 2017
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Article
Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC5624509/
https://ncbi.nlm.nih.gov/pubmed/28983323
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41566-017-0004-4
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