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Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer
This paper presents a thermal convection–based sensor fabricated using simple microelectromechanical systems (MEMS)-based processes. This sensor can be applied to both acceleration and inclination measurements without modifying the structure. Because the operating mechanism of the accelerometer is t...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5579545/ https://ncbi.nlm.nih.gov/pubmed/28767051 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17081765 |
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