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Near-Field Optical Drilling of Sub-λ Pits in Thin Polymer Films
[Image: see text] Under UV illumination, polymer films can undergo chain scission and contract. Using this effect, tightly focused laser light is shown to develop runaway near-field concentration that drills sub-100 nm pits through a thin film. This subwavelength photolithography can be controlled i...
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| Publicado no: | ACS Photonics |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
American
Chemical Society
2017
|
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5578361/ https://ncbi.nlm.nih.gov/pubmed/28868327 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsphotonics.6b01000 |
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