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A patterned single layer graphene resistance temperature sensor
Micro-fabricated single-layer graphenes (SLGs) on a silicon dioxide (SiO(2))/Si substrate, a silicon nitride (SiN) membrane, and a suspended architecture are presented for their use as temperature sensors. These graphene temperature sensors act as resistance temperature detectors, showing a quadrati...
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| 出版年: | Sci Rep |
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| 主要な著者: | , , , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Nature Publishing Group UK
2017
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5562788/ https://ncbi.nlm.nih.gov/pubmed/28821773 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-08967-y |
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