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Fabrication of three-dimensional suspended, interlayered and hierarchical nanostructures by accuracy-improved electron beam lithography overlay

Nanofabrication techniques are essential for exploring nanoscience and many closely related research fields such as materials, electronics, optics and photonics. Recently, three-dimensional (3D) nanofabrication techniques have been actively investigated through many different ways, however, it is st...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Yoon, Gwanho, Kim, Inki, So, Sunae, Mun, Jungho, Kim, Minkyung, Rho, Junsuk
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2017
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5532261/
https://ncbi.nlm.nih.gov/pubmed/28751643
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-06833-5
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