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Electrochemical buckling microfabrication

Can isotropic wet chemical etching be controlled with a spatial resolution at the nanometer scale, especially, for the repetitive microfabrication of hierarchical 3D μ-nanostructures on the continuously curved surface of functional materials? We present an innovative wet chemical etching method call...

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Bibliografiske detaljer
Udgivet i:Chem Sci
Main Authors: Zhang, Jie, Dong, Bo-Ya, Jia, Jingchun, Han, Lianhuan, Wang, Fangfang, Liu, Chuan, Tian, Zhong-Qun, Tian, Zhao-Wu, Wang, Dongdong, Zhan, Dongping
Format: Artigo
Sprog:Inglês
Udgivet: Royal Society of Chemistry 2016
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5523117/
https://ncbi.nlm.nih.gov/pubmed/28791112
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1039/c5sc02644j
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