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Integration of Carbon Nanotubes in Microsystems: Local Growth and Electrical Properties of Contacts
Carbon nanotubes (CNTs) have been directly grown onto a silicon microsystem by a local synthesis method. This method has potential for wafer-level complimentary metal-oxide-semiconductor (CMOS) transistor-compatible integration of CNTs into more complex Si microsystems; enabling, e.g., gas sensors a...
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| Veröffentlicht in: | Materials (Basel) |
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| Hauptverfasser: | , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2013
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5521236/ https://ncbi.nlm.nih.gov/pubmed/28811424 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma6083094 |
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