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Virtual rough samples to test 3D nanometer-scale scanning electron microscopy stereo photogrammetry
The combination of scanning electron microscopy for high spatial resolution, images from multiple angles to provide 3D information, and commercially available stereo photogrammetry software for 3D reconstruction offers promise for nanometer-scale dimensional metrology in 3D. A method is described to...
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Publicado no: | Proc SPIE Int Soc Opt Eng |
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Main Authors: | , , |
Formato: | Artigo |
Idioma: | Inglês |
Publicado em: |
2016
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Assuntos: | |
Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5520641/ https://ncbi.nlm.nih.gov/pubmed/28736475 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/12.2219777 |
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