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Virtual rough samples to test 3D nanometer-scale scanning electron microscopy stereo photogrammetry

The combination of scanning electron microscopy for high spatial resolution, images from multiple angles to provide 3D information, and commercially available stereo photogrammetry software for 3D reconstruction offers promise for nanometer-scale dimensional metrology in 3D. A method is described to...

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Detalhes bibliográficos
Publicado no:Proc SPIE Int Soc Opt Eng
Main Authors: Villarrubia, J.S., Tondare, V.N., Vladár, A.E.
Formato: Artigo
Idioma:Inglês
Publicado em: 2016
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5520641/
https://ncbi.nlm.nih.gov/pubmed/28736475
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/12.2219777
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