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Directed Self-Assembly on Photo-Crosslinked Polystyrene Sub-Layers: Nanopattern Uniformity and Orientation

A photo-crosslinked polystyrene (PS) thin film is investigated as a potential guiding sub-layer for polystyrene-block-poly (methyl methacrylate) block copolymer (BCP) cylindrical nanopattern formation via topographic directed self-assembly (DSA). When compared to a non-crosslinked PS brush sub-layer...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:Materials (Basel)
Hauptverfasser: Koh, Haeng-Deog, Kim, Mi-Jeong
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI 2016
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5509098/
https://ncbi.nlm.nih.gov/pubmed/28773768
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma9080648
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