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Numerical Simulations of Directed Self-Assembly in Diblock Copolymer Films using Zone Annealing and Pattern Templating
Bulk fabrication of surface patterns with sub-20 nm feature sizes is immensely desirable for many existing and emerging technologies. Directed self-assembly (DSA) of block copolymers (BCPs) has been a recently demonstrated approach to achieve such feature resolution over large-scale areas with minim...
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| Published in: | Sci Rep |
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| Main Authors: | , |
| Format: | Artigo |
| Language: | Inglês |
| Published: |
Nature Publishing Group UK
2017
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5507907/ https://ncbi.nlm.nih.gov/pubmed/28701696 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-05565-w |
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