Cita APA

Josell, D., Silva, M., & Moffat, T. (2016). Superconformal Bottom-Up Cobalt Deposition in High Aspect Ratio Through Silicon Vias. ECS Trans.

Citación estilo Chicago

Josell, D., M. Silva, y T.P Moffat. "Superconformal Bottom-Up Cobalt Deposition in High Aspect Ratio Through Silicon Vias." ECS Trans 2016.

Cita MLA

Josell, D., M. Silva, y T.P Moffat. "Superconformal Bottom-Up Cobalt Deposition in High Aspect Ratio Through Silicon Vias." ECS Trans 2016.