A carregar...
Re-distribution of oxygen at the interface between γ-Al(2)O(3) and TiN
Interface of TiN electrode with γ-Al(2)O(3) layers was studied using near edge X-ray absorption fine structure, conventional X-ray photoelectron spectroscopy and photoelectron spectroscopy with high energies. Despite the atomic-layer deposited Al(2)O(3) being converted into thermodynamically-stable...
Na minha lista:
| Publicado no: | Sci Rep |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2017
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5495785/ https://ncbi.nlm.nih.gov/pubmed/28674397 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-04804-4 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|