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Ultrasensitive Magnetic Nanoparticle Detector for Biosensor Applications
Ta/Ru/Co/Ru/Co/Cu/Co/Ni(80)Fe(20)/Ta spin-valve giant magnetoresistive (GMR) multilayers were deposited using UHV magnetron sputtering and optimized to achieve a 13% GMR ratio before patterning. The GMR multilayer was patterned into 12 sensor arrays using a combination of e-beam and optical lithogra...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5492373/ https://ncbi.nlm.nih.gov/pubmed/28587265 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17061296 |
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