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Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy
In this paper, we apply a digital holographic microscope (DHM) in conjunction with stroboscopic acquisition synchronization. Here, the temperature-dependent decrease of the first resonance frequency (S(1)(T)) and Young’s elastic modulus (E(1)(T)) of silicon micromechanical cantilever sensors (MCSs)...
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| Publicado en: | Sensors (Basel) |
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| Autores principales: | , , , , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5490691/ https://ncbi.nlm.nih.gov/pubmed/28545236 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17061191 |
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