Nanotwinned metal MEMS films with unprecedented strength and stability

Silicon-based microelectromechanical systems (MEMS) sensors have become ubiquitous in consumer-based products, but realization of an interconnected network of MEMS devices that allows components to be remotely monitored and controlled, a concept often described as the “Internet of Things,” will requ...

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Udgivet i:Sci Adv
Main Authors: Sim, Gi-Dong, Krogstad, Jessica A., Reddy, K. Madhav, Xie, Kelvin Y., Valentino, Gianna M., Weihs, Timothy P., Hemker, Kevin J.
Format: Artigo
Sprog:Inglês
Udgivet: American Association for the Advancement of Science 2017
Fag:
Research Articles
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5489264/
https://ncbi.nlm.nih.gov/pubmed/28782015
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1126/sciadv.1700685
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