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A top-down approach for fabricating three-dimensional closed hollow nanostructures with permeable thin metal walls

We report on a top-down method for the controlled fabrication of three-dimensional (3D), closed, thin-shelled, hollow nanostructures (nanocages) on planar supports. The presented approach is based on conventional microelectronic fabrication processes and exploits the permeability of thin metal films...

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Vydáno v:Beilstein J Nanotechnol
Hlavní autoři: Barrios, Carlos Angulo, Canalejas-Tejero, Víctor
Médium: Artigo
Jazyk:Inglês
Vydáno: Beilstein-Institut 2017
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC5480350/
https://ncbi.nlm.nih.gov/pubmed/28685123
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.8.124
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