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Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors

The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, chalcogenid...

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Podrobná bibliografie
Vydáno v:Sci Rep
Hlavní autoři: Baudet, E., Sergent, M., Němec, P., Cardinaud, C., Rinnert, E., Michel, K., Jouany, L., Bureau, B., Nazabal, V.
Médium: Artigo
Jazyk:Inglês
Vydáno: Nature Publishing Group UK 2017
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC5471270/
https://ncbi.nlm.nih.gov/pubmed/28615650
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-03678-w
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