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Squeeze-Film Air Damping of a Five-Axis Electrostatic Bearing for Rotary Micromotors
Air-film damping, which dominates over other losses, plays a significant role in the dynamic response of many micro-fabricated devices with a movable mass suspended by various bearing mechanisms. Modeling the damping characteristics accurately will be greatly helpful to the bearing design, control,...
Gorde:
| Argitaratua izan da: | Sensors (Basel) |
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| Egile Nagusiak: | , , , |
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
MDPI
2017
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| Gaiak: | |
| Sarrera elektronikoa: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5470795/ https://ncbi.nlm.nih.gov/pubmed/28505089 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17051119 |
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