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Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching

Nanopore-based analysis is currently an area of great interest in many disciplines with the potential for exceptionally versatile applications in medicine. This work presents a novel step towards fabrication of a single solid-state nanopore (SSSN) in a thin silicon membrane. Silicon nanopores are re...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:Materials (Basel)
Hauptverfasser: Khan, Muhammad Shuja, Williams, John Dalton
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI 2015
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5458877/
https://ncbi.nlm.nih.gov/pubmed/28793644
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma8115390
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