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Prediction Surface Morphology of Nanostructure Fabricated by Nano-Oxidation Technology

Atomic force microscopy (AFM) was used for visualization of a nano-oxidation technique performed on diamond-like carbon (DLC) thin film. Experiments of the nano-oxidation technique of the DLC thin film include those on nano-oxidation points and nano-oxidation lines. The feature sizes of the DLC thin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:Materials (Basel)
Hauptverfasser: Huang, Jen-Ching, Chang, Ho, Kuo, Chin-Guo, Li, Jeen-Fong, You, Yong-Chin
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI 2015
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5458819/
https://ncbi.nlm.nih.gov/pubmed/28793721
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma8125468
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