Wird geladen...

In Situ Hall Effect Monitoring of Vacuum Annealing of In(2)O(3):H Thin Films

Hydrogen doped In(2)O(3) thin films were prepared by room temperature sputter deposition with the addition of H(2)O to the sputter gas. By subsequent vacuum annealing, the films obtain high mobility up to 90 cm(2)/Vs. The films were analyzed in situ by X-ray photoelectron spectroscopy (XPS) and ex s...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Materials (Basel)
Hauptverfasser: Wardenga, Hans F., Frischbier, Mareike V., Morales-Masis, Monica, Klein, Andreas
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI 2015
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5455274/
https://ncbi.nlm.nih.gov/pubmed/28787957
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma8020561
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!