Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources

We report a new method for growing hexagonal columnar nanograin structured silicon carbide (SiC) thin films on silicon substrates by using graphene–graphitic carbon nanoflakes (GGNs) templates from solid carbon sources. The growth was carried out in a conventional low pressure chemical vapor deposit...

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Dettagli Bibliografici
Pubblicato in:Materials (Basel)
Autori principali: Liu, Xingfang, Sun, Guosheng, Liu, Bin, Yan, Guoguo, Guan, Min, Zhang, Yang, Zhang, Feng, Chen, Yu, Dong, Lin, Zheng, Liu, Liu, Shengbei, Tian, Lixin, Wang, Lei, Zhao, Wanshun, Zeng, Yiping
Natura: Artigo
Lingua:Inglês
Pubblicazione: MDPI 2013
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Article
Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC5452306/
https://ncbi.nlm.nih.gov/pubmed/28809227
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma6041543
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