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Pore Narrowing of Mesoporous Silica Materials
To use mesoporous silicas as low-k materials, the pore entrances must be really small to avoid diffusion of metals that can increase the dielectric constant of the low-k dielectric. In this paper we present a new method to narrow the pores of mesoporous materials through grafting of a cyclic-bridged...
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| Publié dans: | Materials (Basel) |
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| Auteurs principaux: | , , , , , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
MDPI
2013
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5452099/ https://ncbi.nlm.nih.gov/pubmed/28809327 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma6020570 |
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