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Ultrahigh-Q optomechanical crystal cavities fabricated in a CMOS foundry
Photonic crystals use periodic structures to create frequency regions where the optical wave propagation is forbidden, which allows the creation and integration of complex optical functionalities in small footprint devices. Such strategy has also been successfully applied to confine mechanical waves...
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| Publicado no: | Sci Rep |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5449385/ https://ncbi.nlm.nih.gov/pubmed/28559585 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-02515-4 |
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