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Influence of NH(3) plasma and Ti doping on pH-sensitive CeO(2) electrolyte-insulator-semiconductor biosensors
In this study, CeO(2) pH-sensitive sensing membranes in electrolyte-insulator-semiconductor structures on silicon substrate were fabricated. To enhance sensing performance, the membrane underwent Ti doping and NH(3) plasma treatment on the surface. To examine the effects of Ti doping and plasma trea...
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| Gepubliceerd in: | Sci Rep |
|---|---|
| Hoofdauteurs: | , , , , , , |
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
Nature Publishing Group UK
2017
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| Onderwerpen: | |
| Online toegang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5445090/ https://ncbi.nlm.nih.gov/pubmed/28546585 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-02692-2 |
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