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Influence of NH(3) plasma and Ti doping on pH-sensitive CeO(2) electrolyte-insulator-semiconductor biosensors
In this study, CeO(2) pH-sensitive sensing membranes in electrolyte-insulator-semiconductor structures on silicon substrate were fabricated. To enhance sensing performance, the membrane underwent Ti doping and NH(3) plasma treatment on the surface. To examine the effects of Ti doping and plasma trea...
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| Publicado no: | Sci Rep |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5445090/ https://ncbi.nlm.nih.gov/pubmed/28546585 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-02692-2 |
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