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An Angstrom-sensitive, differential MEMS capacitor for monitoring the milliliter dynamics of fluids
A device, with MEMS sensors at its core, has been fabricated and tested for measuring low fluid pressure and slow flow rates. The motivation was to measure clinically relevant ranges of slow-moving fluids in living systems, such as the cerebrospinal fluid in the brain. For potential clinical utility...
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| Publicado en: | Sens Actuators A Phys |
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| Autores principales: | , , , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
2016
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5438090/ https://ncbi.nlm.nih.gov/pubmed/28533631 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.sna.2016.10.030 |
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