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Solid-state nanopore localization by controlled breakdown of selectively thinned membranes
We demonstrate precise positioning of nanopores fabricated by controlled breakdown (CBD) on solid-state membranes by spatially varying the electric field strength with localized membrane thinning. We show 100 × 100-nm(2) precision in standard SiN(x) membranes (30-100 nm thick) after selective thinni...
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| Published in: | Nanotechnology |
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| Main Authors: | , , , |
| Format: | Artigo |
| Language: | Inglês |
| Published: |
2017
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5408306/ https://ncbi.nlm.nih.gov/pubmed/28045003 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/1361-6528/aa564d |
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