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Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry
In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5375748/ https://ncbi.nlm.nih.gov/pubmed/28245603 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17030462 |
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