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Performance Characterization of an xy-Stage Applied to Micrometric Laser Direct Writing Lithography

This article concerns the characterization of the stability and performance of a motorized stage used in laser direct writing lithography. The system was built from commercial components and commanded by G-code. Measurements use a pseudo-periodic-pattern (PPP) observed by a camera and image processi...

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Bibliografske podrobnosti
izdano v:Sensors (Basel)
Main Authors: Jaramillo, Juan, Zarzycki, Artur, Galeano, July, Sandoz, Patrick
Format: Artigo
Jezik:Inglês
Izdano: MDPI 2017
Teme:
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC5336059/
https://ncbi.nlm.nih.gov/pubmed/28146126
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17020278
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