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Pull-In Effect of Suspended Microchannel Resonator Sensor Subjected to Electrostatic Actuation
In this article, the pull-in instability and dynamic characteristics of electrostatically actuated suspended microchannel resonators are studied. A theoretical model is presented to describe the pull-in effect of suspended microchannel resonators by considering the electrostatic field and the intern...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5298687/ https://ncbi.nlm.nih.gov/pubmed/28075344 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17010114 |
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