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Low-temperature remote plasma enhanced atomic layer deposition of ZrO(2)/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
Encapsulation is essential to protect the air-sensitive components of organic light-emitting diodes (OLEDs) such as active layers and cathode electrodes. In this study, hybrid zirconium inorganic/organic nanolaminates were fabricated using remote plasma enhanced atomic layer deposition (PEALD) and m...
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| Publicado en: | Sci Rep |
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| Main Authors: | , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Nature Publishing Group
2017
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5216332/ https://ncbi.nlm.nih.gov/pubmed/28059160 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep40061 |
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