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Design and Fabrication of Micro Hemispheric Shell Resonator with Annular Electrodes
Electrostatic driving and capacitive detection is widely used in micro hemispheric shell resonators (HSR). The capacitor gap distance is a dominant factor for the initial capacitance, and affects the driving voltage and sensitivity. In order to decrease the equivalent gap distance, a micro HSR with...
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| Pubblicato in: | Sensors (Basel) |
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| Autori principali: | , , , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2016
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5190972/ https://ncbi.nlm.nih.gov/pubmed/27897977 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16121991 |
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